Vaporization supply apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 12, 2020
Grant Date -
Mar 15, 2018
app pub date -
Apr 11, 2016
filing date -
Apr 30, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2016 Application Filing Year
- C23C Class
- 3247 Applications Filed
- 2111 Patents Issued To-Date
- 65.02 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- 5 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Nov 12, 2027 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 12, 2031 |
