MANUFACTURING METHOD OF FLUID CONTROL DEVICE
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United States of America Patent
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Jul 3, 2017
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Sep 5, 2016
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Abstract
A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The deformable substrate includes a flexible plate and a communication plate. A bulge is formed on the vibration plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other. A preformed synchronous deformation process is implemented. Consequently, a preformed synchronously-deformed structure is defined. Then, the housing, the piezoelectric actuator and the deformable substrate which are sequentially stacked on each other are coupled. The preformed synchronously-deformed structure is aligned with the bulge of the vibration plate. Consequently, a specified depth is defined between the movable part of the flexible plate and the bulge of the vibration plate.
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