Method and device for focusing in an inspection system
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United States of America Patent
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Jul 28, 2020
Grant Date -
Mar 8, 2018
app pub date -
Aug 22, 2017
filing date -
Sep 6, 2016
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Abstract
An inspection apparatus includes an inspection optical system configured to a direct an inspection beam onto a surface of a substrate, the inspection optical system having an objective, a focus measurement optical system configured to receive a focus measurement beam, redirected by the substrate, from the objective, the focus measurement optical system having a movable reflective element configured to receive the focus measurement beam, and a control system configured to cause movement of the reflective element with a direction component along a beam path of the focus measurement beam and configured to determine whether the substrate surface is in the focus of the objective based on the focus measurement beam.
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