Coordinate measuring apparatus with air bearing monitoring and adjusting capability
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United States of America Patent
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Oct 20, 2020
Grant Date -
Mar 8, 2018
app pub date -
Oct 30, 2017
filing date -
Apr 30, 2015
priority date (Note) -
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Abstract
A coordinate measuring apparatus is provided having at least one measuring system and at least one support structure on which the measuring system is disposed, wherein the measuring system is displaceably mounted in the support structure and/or the support structure is displaceably mounted, and wherein the coordinate measuring apparatus includes an air bearing arrangement for mounting two components to be movable relative to one another. The air bearing arrangement includes at least one air bearing which provides a compressed air cushion between the components, wherein the air bearing has at least one compressed air supply line by way of which the compressed air can be provided, wherein a flow rate meter by way of which the flow rate of compressed air to the air bearing can be detected is provided in the compressed air supply line.
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