Importance

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Abstract

Excessive evaporation of powder is prevented. A three-dimensional shaping apparatus includes an electron gun that generates an electron beam; a primary main deflector that deflects the electron beam one- or two-dimensionally; at least one lens that is provided between the electron gun and the primary main deflector and focuses the electron beam; a sub-deflector that is provided between the electron gun and the primary main deflector, deflects the electron beam one- or two-dimensionally, and has a deflection area smaller than the deflection area of the primary main deflector and the scanning speed higher than a scanning speed of the primary main deflector; and a controller that controls deflection directions and the scanning speeds of the primary main deflector and the sub-deflector. The primary main deflector moves the deflection area of the sub-deflector, and the sub-deflector performs multiple scanning and irradiation of small regions, in which scanning and irradiation the small regions are each included in the deflection area and scanned and irradiated with the electron beam for a predetermined number of times.

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First Claim