Radio frequency processing apparatus and method
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United States of America Patent
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Sep 1, 2020
Grant Date -
Mar 1, 2018
app pub date -
Aug 9, 2017
filing date -
Aug 9, 2016
priority date (Note) -
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Abstract
In an embodiment, an apparatus includes a radio frequency (RF) generator that is to generate a RF signal, first and second electrodes, and an impedance match module in series between the RF generator and the first electrode. The RF generator detects reflected power from the RF signal applied to a load electrically coupled between the first and second electrodes to change a temperature of the load, the RF signal to be applied to the load until the reflected power reaches a particular value.
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