ACTIVE LAYER, THIN FILM TRANSISTOR, ARRAY SUBSTRATE, AND DISPLAY APPARATUS AND FABRICATION METHODS

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United States of America Patent

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15534415

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Abstract

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The present disclosure provides an active layer, a thin film transistor, an array substrate, and a display apparatus, and fabrication methods thereof. A method for fabricating an active layer in a thin film transistor is provided by forming a thin film by a direct current (DC) sputtering process; and etching the thin film to form the active layer. The thin film is made of a material selected to provide the active layer with a carrier concentration of at least approximately 1×1017 cm−3 and a carrier mobility of at least approximately 20 cm2/Vs.

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Patent Owner(s)

Patent OwnerAddress
BOE TECHNOLOGY GROUP CO LTD100015 NO 10 JIUXIANQIAO ROAD BEIJING CHAOYANG DISTRICT BEIJING CITY BEIJING CITY 100015
SOUTH CHINA UNIVERSITY OF TECHNOLOGY510641 NO FIVE 381 MOUNTAIN ROAD GUANGZHOU GUANGDONG TIANHE DISTRICT GUANGZHOU CITY GUANGDONG PROVINCE 510641

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LAN, Linfeng Beijing, CN 21 22
PENG, Junbiao Beijing, CN 26 28
WANG, Lei Beijing, CN 2386 21419
XU, Xiaoguang Beijing, CN 23 48
YAN, Liangchen Beijing, CN 98 70
YUAN, Guangcai Beijing, CN 248 413

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