Electrochemical sensor, and a method of forming an electrochemical sensor
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United States of America Patent
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Apr 14, 2020
Grant Date -
Mar 1, 2018
app pub date -
Aug 30, 2016
filing date -
Aug 30, 2016
priority date (Note) -
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Abstract
An electrochemical sensor is provided which may be formed using micromachining techniques commonly used in the manufacture of integrated circuits. This is achieved by forming microcapillaries in a silicon substrate and forming an opening in an insulating layer to allow environmental gases to reach through to the top side of the substrate. A porous electrode is printed on the top side of the insulating layer such that the electrode is formed in the opening in the insulating layer. The sensor also comprises at least one additional electrode. The electrolyte is then formed on top of the electrodes. A cap is formed over the electrodes and electrolyte. This arrangement may easily be produced using micromachining techniques.
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