Method of determining sub-divisional error of an encoder apparatus configured to measure relative position of relatively moveable parts
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United States of America Patent
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Mar 1, 2018
app pub date -
Apr 28, 2016
filing date -
Apr 29, 2015
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Abstract
A method of determining sub-divisional error of an encoder apparatus, which is configured to measure relative position of relatively moveable parts of an apparatus on which an inspection device for inspecting an artefact is mounted, includes causing the inspection device to inspect a feature so as to obtain measurements of a surface of the feature by relatively moving the relatively moveable parts of the apparatus. The method also includes using the measurements of the surface of the feature obtained by the inspection device during the inspection of the feature to determine the sub-divisional error of the encoder apparatus.
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