Method and apparatus for implementing ultra-high stability long-vertical travel stage
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United States of America Patent
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Aug 27, 2019
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Mar 1, 2018
app pub date -
Aug 31, 2016
filing date -
Aug 31, 2016
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Abstract
A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.
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