LIFT PIN AND METHOD FOR MANUFACTURING SAME

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Jan 22, 2016
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Mar 19, 2015

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Abstract

A lift pin passes through a hole of a susceptor on which a wafer is placed inside a process chamber in which an epitaxial process is performed with respect to the wafer, to support the wafer, and has a surface formed of a glassy carbon material.

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MICO LTD	100 GONGDAN-RO GYEONGGI-DO ANSEONG-SI 17567

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Inventor Name	Address	# of filed Patents	Total Citations
JUNG, Kwon Ho	Suwon-si, KR	1	1
YOON, Sung Hee	Cheongju-si, KR	16	184

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LIFT PIN AND METHOD FOR MANUFACTURING SAME

Number of patents in Portfolio can not be more than 2000

United States of America Patent

15556167

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15556167

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