Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer
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United States of America Patent
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Jun 25, 2019
Grant Date -
Feb 22, 2018
app pub date -
Aug 17, 2016
filing date -
Aug 17, 2016
priority date (Note) -
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Abstract
A plurality of temperature adjusters each independently include a control loop. A manipulated variable calculator is configured to give manipulated variables to the respective temperature adjusters and includes a reference model output generator configured to provide a reference model as a response output for reaching a temperature setpoint when a first control loop having a slowest response speed among the control loops is defined to have a 100% manipulated variable. The reference model output generator includes: a simulator configured to determine a manipulated variable pattern by conducting successive search of a switching time; and a reference model obtained from a response in which, among the plurality of control loops, the first control loop having the slowest response speed is defined to have the 100% manipulated variable, and the rest of the plurality of control loops are controlled to follow the first control loop.
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