Nanoporous semiconductor thin films

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United States of America Patent

PATENT NO 10845328
APP PUB NO 20180052136A1
SERIAL NO

15676617

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Abstract

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The present disclosure provides a method of fabricating a nanoporous thin film device comprising depositing a template on a substrate to form a nanoporous insulating layer, the template comprising one or more polymers capable of forming pores when polymerized and at least one cross-linking agent, and depositing a second layer (e.g. organic semiconductor, semiconductor, insulator) on the nonporous insulating layer to form a thin film having a plurality of isolated nanopores on the surface. Nanoporous semiconductor thin films made by these methods is provided. Sensors and devices comprising the nanoporous thin film is also disclosed.

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Patent Owner(s)

Patent OwnerAddress
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS352 HENRY ADMINISTRATION BUILDING 506 SOUTH WRIGHT STREET URBANA IL 61801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Diao, Ying Urbana, US 6 23
Zhang, Fengjiao Urbana, US 5 7

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