PHYSICAL PARAMETER ESTIMATING METHOD, PHYSICAL PARAMETER ESTIMATING DEVICE, AND ELECTRONIC APPARATUS
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United States of America Patent
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Issued Date -
Feb 22, 2018
app pub date -
Mar 2, 2017
filing date -
Aug 19, 2016
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Abstract
A physical parameter estimating method, a physical parameter estimating device, and electronic apparatus are disclosed. The method includes: reading a Newton's rings fringe pattern of a unit to be measured; calculating a magnitude spectrum of an intensity distribution signal of at least one first-direction pixel set in the Newton's rings fringe pattern under each fractional Fourier transform (FRFT) order in a searching range of FRFT orders; determining a matched order of the intensity distribution signal according to the calculated magnitude spectrums; and estimating a physical parameter involved in the interferometric measurement according to at least the matched order. Therefore, physical parameters of the unit to be measured can be estimated with high accuracy even in presence of noise and obstacles in the fringe pattern.
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