MANUFACTURING METHOD OF ALIGNMENT FLIM AND DEVICE FOR MANUFACTURING ALIGNMENT FILM
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Nov 9, 2016
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Mar 29, 2016
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A manufacturing method of an alignment film and a device for manufacturing an alignment film are provided, and the manufacturing method of the alignment film includes: irradiating a substrate with excimer ultraviolet (EUV) light; performing a cleaning process on the substrate which has been irradiated by the EUV light; and forming an alignment film on the substrate which has been performed the cleaning process. A substrate is irradiated with EUV light before performing a cleaning process on the substrate, and the organic contaminants which are difficult to be washed off on the surface of the substrate can be decomposed by the irradiating of the EUV light, therefore the coating defect is reduced.
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