MEMS MICROPHONE ELEMENT AND MANUFACTURING METHOD THEREOF
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United States of America Patent
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Dec 10, 2015
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May 29, 2015
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Abstract
The present invention discloses a MEMS microphone element, comprising a base, the base being provided with a first opening and a second opening which run through from top to bottom; and a first capacitor and a second capacitor disposed on the base in parallel, the first capacitor being disposed on the first opening, and the second capacitor being disposed on the second opening, wherein the first capacitor comprises a first back pole plate located below, and a first vibrating diaphragm located above and opposite to the first back pole plate, the second capacitor comprises a second back pole plate located above, and a second vibrating diaphragm located on below and opposite to the second back pole plate; and the first capacitor and the second capacitor form a pair of differential capacitors together.
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