DIFFERENTIAL-CAPACITANCE TYPE MEMS MICROPHONE
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United States of America Patent
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N/A
Issued Date -
N/A
app pub date -
Dec 10, 2015
filing date -
May 29, 2015
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
The present invention discloses a differential-capacitance type MEMS microphone, comprising a circuit board, a first MEMS chip and a second MEMS chip; wherein the first MEMS chip comprises a first substrate disposed on the circuit board, and a first capacitor disposed on the first substrate, the first capacitor comprising a first back pole plate located above, a first vibrating diaphragm located below, and a first isolating layer disposed between the first back pole plate and the first vibrating diaphragm; the second MEMS chip comprises a second substrate disposed on the circuit board, and a second capacitor disposed on the second substrate, the second capacitor comprising a second back pole plate located below, a second vibrating diaphragm located above, and a second isolating layer disposed between the second back pole plate and the second vibrating diaphragm; and the first capacitor and the second capacitor form a pair of differential capacitors.
First Claim
Other Claims data not available