Electret element, electromechanical converter and method for manufacturing electret element

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United States of America Patent

PATENT NO 10833607
APP PUB NO 20180041140A1
SERIAL NO

15550215

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Abstract

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An electret element includes: an Si layer, an SiO2 layer formed at a surface of the Si layer; and an electret formed at the SiO2 layer near an interface of the SiO2 layer and the Si layer.

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Patent Owner(s)

Patent OwnerAddress
THE UNIVERSITY OF TOKYOBUNKYO-KU TOKYO 113-8654
SAGINOMIYA SEISAKUSHO INCTOKYO 165-0033

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ashizawa, Hisayuki Sayama, JP 23 42
Fujita, Hiroyuki Tokyo, JP 290 3516
Hashiguchi, Gen Tokyo, JP 19 127
Ishibashi, Kazunori Sayama, JP 14 82
Mitsuya, Hiroyuki Sayama, JP 23 94

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