Importance

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Abstract

Systems, methods, and apparatus are disclosed for reducing crazing in thin film stacks deposited on large area substrates such as glass, for instance architectural glass. Crazing can occur once a conductor-insulator-conductor series of films have been deposited, thereby effectively forming a capacitor, and where the substrate spans multiple deposition chambers such the coupling between chambers can cause the effective capacitor voltage to breakdown the insulator layer between the two conductor layers. The resulting crazing can be reduced if not eliminated through the grounding of outputs of an AC power supply that assists in deposition of one of the conductor layers. The grounding is via rectified channels, such as diodes, or series of diodes such that the outputs of the AC power supply are precluded from falling below ground potential.

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First Claim