Low-defect-porous polishing pad
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United States of America Patent
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Jun 23, 2020
Grant Date -
Feb 8, 2018
app pub date -
Aug 4, 2016
filing date -
Aug 4, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
The polishing pad is suitable for polishing or planarizing at least one of semiconductor, optical and magnetic substrates with a polishing fluid and relative motion between the polishing pad and the at least one of semiconductor, optical and magnetic substrates. The polishing layer has an open-cell polymeric matrix, a polishing surface, a plurality of grooves in the polishing layer. The plurality of projecting land areas are buttressed with a tapered support structure that extends outward and downward from the bottom plurality of projecting land areas. The plurality of projecting land areas have an average width less than average width of the plurality of grooves for decreasing polishing dwell time of the projecting land areas and increasing the debris removal dwell time of the groove areas to a value greater than the polishing dwell time.
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