MEMS device and process
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United States of America Patent
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Jun 25, 2019
Grant Date -
Feb 1, 2018
app pub date -
Jul 26, 2017
filing date -
Jul 28, 2016
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Abstract
The application describes MEMS transducers comprising a flexible membrane layer supported in a fixed relation relative to a substrate along at least one supporting edge, wherein a plurality of slits are provided through the membrane layer. The slits define a plurality of beams. Each beam defines a path between first and second endpoints of the beam, the path comprising at least one change in direction. Also described are transducers wherein the membrane layer is supported in a fixed relation relative to the substrate along a plurality of supporting edges which define a membrane region that is substantially bounded by the supporting edges.
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