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Abstract

This application relates to MEMS devices, especially MEMS capacitive transducers and to processes for forming such MEMS transducer that provide increased robustness and resilience to acoustic shock. The application describes a MEMS transducer (400) having at least one membrane layer (101) supported so as to define a flexible membrane. A strengthening layer (401; 701) is mechanically coupled to the membrane layer and is disposed around the majority of a peripheral area of the flexible membrane but does not extend over the whole flexible membrane. The strengthening layer, which in some embodiments may be formed from the same material as the membrane electrode (102) being disposed in the peripheral area helps reduce stress in membrane at locations that otherwise may be highly stressed in acoustic shock situations. The membrane may be supported over a substrate cavity and the strengthening layer may be provided in an area of the membrane that could make contact with the edge (202) of the substrate cavity.

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