Piezoelectric actuator, piezoelectric motor, robot, and electronic component conveyance apparatus
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United States of America Patent
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May 19, 2020
Grant Date -
Feb 1, 2018
app pub date -
Jul 27, 2017
filing date -
Jul 28, 2016
priority date (Note) -
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Abstract
A piezoelectric actuator includes a vibrating plate having a piezoelectric material, and a contact part provided in an end portion of the vibrating plate in contact with a driven part, wherein the contact part has a first portion in contact with the driven part and a second portion provided between the first portion and the vibrating plate and having lower rigidity than the first portion. Further, a width of the second portion in a direction crossing an arrangement direction of the first portion and the second portion is smaller than a width of the first portion in the crossing direction.
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