Laser apparatus and extreme ultraviolet light generation apparatus
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United States of America Patent
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Feb 19, 2019
Grant Date -
Feb 1, 2018
app pub date -
Apr 20, 2016
filing date -
Apr 20, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
Kinematic mounts have three points having zero degree of freedom, one degree of freedom, and two degrees of freedom, respectively. As viewed from a direction perpendicular to a plane containing the three points, an extension of an entrance optical axis of a laser beam to an amplifying apparatus or an extension of an exit optical axis from the amplifying apparatus is oriented to the point with the zero degree of freedom. A translational direction of the point with the one degree of freedom is oriented to the point with the zero degree of freedom. One of the extension of the entrance optical axis and the extension of the exist optical axis passes on a side closer to the point with the two degrees of freedom with respect to a side of the point with the one degree of freedom.
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