Using metal-containing layer to reduce carrier shock in package formation
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United States of America Patent
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Sep 25, 2018
Grant Date -
Feb 1, 2018
app pub date -
Jul 29, 2016
filing date -
Jul 29, 2016
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Abstract
A method includes forming a dielectric layer over a radiation de-bondable coating. The radiation de-bondable coating is over a carrier, and the radiation de-bondable coating includes metal particles therein. Metal posts are formed over the dielectric layer. A device die is attached to the dielectric layer. The device die and the metal posts are encapsulated in an encapsulating material. A plurality of redistribution lines is formed on a first side of the encapsulating material, and is electrically coupled to the device die and the metal posts. The carrier is de-bonded by projecting a radiation source on the radiation de-bondable coating to decompose the radiation de-bondable coating. Electrical connections are formed on a second side of the encapsulating material. The electrical connections are electrically coupled to the metal posts.
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