WAFER BOX, METHOD FOR ARRANGING WAFERS IN A WAFER BOX, WAFER PROTECTION PLATE AND METHOD FOR PROTECTING A WAFER
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United States of America Patent
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Issued Date -
Feb 1, 2018
app pub date -
Jul 28, 2017
filing date -
Jul 28, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
Various embodiments provide a wafer box. The wafer box may include a housing with a receiving space for receiving at least one wafer arranged above a housing base, at least one fixing structure which is connected to the housing base and which extends from the housing base, and at least one fixing device which is fastenable to the at least one fixing structure at a variable distance from the housing base. The fixing device and the fixing structure are designed such that the at least one wafer for arrangement in the receiving space can be fixed in a position by means of the at least one fixing device fastened to the fixing structure.
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