WAFER BOX, WAFER STACKING AID, WAFER CARRIER, WAFER TRANSPORT SYSTEM, METHOD FOR LOADING A WAFER BOX WITH WAFERS AND METHOD FOR REMOVING WAFERS FROM A WAFER BOX
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United States of America Patent
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app pub date -
Jul 28, 2017
filing date -
Jul 28, 2016
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Abstract
In various embodiments, a wafer box is provided. The wafer box may include a housing with a receiving space for receiving a stack comprising a plurality of wafers, each arranged above a housing base. The wafers are to be arranged with their main surfaces parallel to the housing base. The receiving space is delimited by the housing base and side walls arranged thereon. The wafer box may further include at least one base opening, arranged in the housing base, for receiving a guide structure of a wafer stacking aid. The guide structure is to be arranged in such a way that, on a side of the housing base on which the side walls are arranged, it extends out of the housing base in order to limit tilting of a wafer raised or lowered in the receiving space in a manner guided by the guide structure.
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