Processing apparatus and method
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United States of America Patent
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Feb 13, 2018
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N/A
app pub date -
Jul 27, 2016
filing date -
Jul 27, 2016
priority date (Note) -
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Abstract
A processing apparatus includes a spin coating chamber, an ultraviolet curing chamber, a transfer module and an enclosure. The transfer module is assigned with a plurality transfer destinations, in which two of the transfer destinations are respectively located within the spin coating chamber and the ultraviolet curing chamber. The transfer module, the spin coating chamber and the ultraviolet curing chamber are enclosed by the enclosure.
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