Flow controlled liner having spatially distributed gas passages
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United States of America Patent
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Jan 1, 2019
Grant Date -
Feb 1, 2018
app pub date -
Sep 26, 2017
filing date -
Apr 30, 2013
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Abstract
Embodiments of the present disclosure provide a liner assembly including a plurality of individually separated gas passages. The liner assembly enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present disclosure.
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