THIN FILM TRANSISTOR, ARRAY SUBSTRATE, AND DISPLAY APPARATUS, AND THEIR FABRICATION METHODS
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Dec 18, 2015
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Dec 18, 2015
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The present disclosure provides a thin film transistor, a thin film transistor array substrate, and a display apparatus, and their fabrication methods. The thin film transistor is formed by forming a source and drain electrode structure. To form the source and drain electrode structure, at least one metal film is formed using a target of a metal element in a sputtering chamber. A gas is introduced in the sputtering chamber to in-situ react with the metal element to form an anti-reflection layer over the at least one metal film.
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