APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE
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United States of America Patent
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Jul 28, 2016
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Jul 28, 2016
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Abstract
The invention relates to an apparatus and method for exposing a sample. The apparatus comprises a source for electromagnetic radiation or particles having energy, an exposing unit for exposing said sample to said electromagnetic radiation or particles, and a substrate holding device for holding said sample at least during said exposing.
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