Systems and methods for generating a multiple patterning lithography compliant integrated circuit layout

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United States of America Patent

PATENT NO 9996657
SERIAL NO

15221676

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Abstract

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Computer-implemented systems and methods for generating a multiple patterning lithography (MPL) compliant integrated circuit layout are provided. A plurality of integrated circuit (IC) cells are assembled to form an IC layout. The IC layout includes at least two IC cells that abut one another. After the assembling of the IC cells, a decomposition algorithm is executed to assign multiple colors to design shapes within the IC layout. Multiple patterning coloring conflicts are detected in the IC layout after the assigning of the colors to the design shapes. A fixing algorithm is executed, under which a conflict present in two abutting IC cells is fixed by flipping or shifting at least one of the abutting IC cells.

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Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDNO 8 LI-HSIN 6 ROAD HSINCHU SCIENCE PARK HSINCHU ROC 30077

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Fong-Yuan Hsinchu, TW 161 472
Chen, Chun-Chen Hsinchu, TW 114 685
Chen, Sheng-Hsiung Hsinchu, TW 141 829
Wang, Shao-Huan Hsinchu, TW 31 79

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