Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device
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United States of America Patent
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Nov 12, 2019
Grant Date -
Feb 1, 2018
app pub date -
Mar 27, 2017
filing date -
Jul 26, 2016
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Abstract
A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device and controlling a transition period of the second switching device to generate a variable waveform having a variable voltage level during the transition period of the second switching device. The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner.
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