Radiation source

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10222702
APP PUB NO 20180031979A1
SERIAL NO

15550855

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A laser radiation source for a lithographic tool comprising a laser module to emit a first laser beam having a first wavelength and a second laser beam having a second wavelength, a beam separation device to separate the optical paths of the first and second laser beams and substantially recombine the optical paths, a beam delivery system to direct the first and second laser beams to a fuel target and an optical isolation apparatus to: adjust the polarization state of the first laser beam, adjust the polarization state of the second laser beam and to block radiation having the adjusted polarization states such that the reflection of the first laser beam and the reflection of the second laser beam are substantially blocked from propagating towards the laser module.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bleeker, Arno Jan Westerhoven, NL 99 3022
Buurman, Erik Petrus Veldhoven, NL 18 154
Eurlings, Markus Franciscus Antonius Tilburg, NL 40 791
Hofstra, Ramon Mark Beekbergen, NL 3 17
Moors, Johannes Hubertus Josephina Helmond, NL 103 998
Muys, Peter Frans Maria Ghent, BE 2 8
Oemrawsingh, Sumant Sukdew Ramanujan Hazerswoude Dorp, NL 3 22
Struycken, Alexander Matthijs Eindhoven, NL 17 282
Voorma, Harm-Jan Kerkdriel, NL 12 75

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 5, 2026
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 5, 2030
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00