Device and method for processing a radiation beam with coherence

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United States of America Patent

PATENT NO 10234767
APP PUB NO 20180031977A1
SERIAL NO

15660498

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Abstract

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Devices and methods for processing a radiation beam with coherence are disclosed. In one arrangement, an optical system receives a radiation beam with coherence. The radiation beam comprises components distributed over one or more radiation beam spatial modes. A waveguide supports a plurality of waveguide spatial modes. The optical system directs a plurality of the components of the radiation beam belonging to a common radiation beam spatial mode and having different frequencies onto the waveguide in such a way that each of the plurality of components couples to a different set of the waveguide spatial modes, each set comprising one or more of the waveguide spatial modes.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akbulut, Duygu Eindhoven, NL 19 56
De, Wit Johannes Matheus Marie Helmond, NL 10 74
Goorden, Sebastianus Adrianus Eindhoven, NL 46 49
Pandey, Nitesh Eindhoven, NL 63 188
Tukker, Teunis Willem Eindhoven, NL 64 230

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