Method of negative tone development using a copolymer multilayer electrolyte and articles made therefrom
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United States of America Patent
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Mar 6, 2018
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app pub date -
Jul 29, 2016
filing date -
Jul 29, 2016
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Abstract
Disclosed herein is a method, comprising disposing a first composition on a substrate, wherein the first composition comprises a first block copolymer comprising a first block and a second block, wherein the first block comprises a repeat unit containing a hydrogen acceptor or a hydrogen donor, and the second block comprises a repeat unit containing a blocked donor when the repeat unit of the first block is a hydrogen acceptor, or a blocked acceptor when the repeat unit of the first block is a hydrogen donor; and a solvent; and deprotecting the blocked acceptor or the blocked donor with a deprotecting agent.
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