Compound, resin and photoresist composition

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United States of America Patent

PATENT NO 11119408
APP PUB NO 20180031969A1
SERIAL NO

15660184

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Abstract

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A resin comprising a structural unit represented by formula (I0):

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITED2-7-1 NIHONBASHI CHUO-KU TOKYO 103-6020

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka, JP 316 1995
Sakamoto, Hiromu Osaka, JP 24 205

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