Extreme ultraviolet mask blank with alloy absorber and method of manufacture

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United States of America Patent

PATENT NO 10877368
APP PUB NO 20180031965A1
SERIAL NO

15652501

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Abstract

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Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a an absorber layer on the capping layer, the absorber layer made from an alloy of at least two absorber materials.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jindal, Vibhu Milpitas, US 83 312

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