LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

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United States of America Patent

SERIAL NO

15647254

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHGERMANY COHEN OBERKOCHEN BADEN-WURTTEMBERG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BACK, Stephan Langenau, DE 9 25
BUECHELE, Joachim Westhausen, DE 7 5
KALLER, Julian Koenigsbronn, DE 22 74
LIMBACH, Guido Aalen, DE 20 80
SOYEZ, Guido Ludwigsburg, DE 12 17
WOELFLE, Harald Waldkirch, DE 9 25

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