Oscillating structure with piezoelectric actuation, system and manufacturing method
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United States of America Patent
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Jul 30, 2019
Grant Date -
Feb 1, 2018
app pub date -
Mar 22, 2017
filing date -
Jul 28, 2016
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Abstract
An oscillating structure with piezoelectric actuation includes first and second torsional elastic elements constrained to respective portions of a fixed supporting body and defining an axis of rotation. A mobile element is positioned between, and connected to, the first and second torsional elastic elements by first and second rigid regions. A first control region is coupled to the first rigid region and includes a first piezoelectric actuator. A second control region is coupled to the second rigid region and includes a second piezoelectric actuator. The first and second piezoelectric actuators are configured to cause local deformation of the first and second control regions to induce a torsion of the first and second torsional elastic elements.
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