Inspection method and inspection apparatus
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United States of America Patent
Stats
-
Jun 30, 2020
Grant Date -
Feb 1, 2018
app pub date -
Feb 2, 2016
filing date -
Feb 10, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An inspection apparatus includes a tester unit that applies a stimulus signal to a semiconductor apparatus, an MO crystal arranged to face a semiconductor apparatus, a light source that outputs light, an optical scanner that irradiates the MO crystal with light output from light source, a light detector that detects light reflected from the MO crystal arranged to face the semiconductor apparatus D and outputs a detection signal, and a computer that generate phase image data based on a phase difference between a reference signal generated based on a stimulus signal and the detection signal, the phase image data including a phase component indicating the phase difference, and generates an image indicating a path of a current from the phase image data.
First Claim
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International Classification(s)
- 2016 Application Filing Year
- G02B Class
- 10130 Applications Filed
- 7990 Patents Issued To-Date
- 78.88 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G02B Class
- 0 % this patent is cited more than
- 5 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 30, 2027 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 30, 2031 |
