Humidity sensor
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United States of America Patent
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Jun 9, 2020
Grant Date -
Feb 1, 2018
app pub date -
Feb 17, 2016
filing date -
Feb 17, 2015
priority date (Note) -
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Abstract
Humidity sensors may exhibit a relatively small amount of hysteresis and/or a faster response time. In some cases, a humidity sensor may include a polymeric humidity sensing layer disposed over an electrode layer. The polymeric humidity sensing layer may include a halogenated layer disposed over the polymeric humidity sensing layer. The polymeric humidity sensing layer may, for example, include a polyimide and the halogenated layer may include a monolayer or less than a monolayer of a halogenated material such as a fluorinated material.
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