AUTOFOCUS SYSTEM AND METHOD

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United States of America Patent

APP PUB NO 20180031368A1
SERIAL NO

15727814

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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New and useful concepts for an autofocus system and method are provided. A basic concept uses fringe projection in an autofocus system and method. A further aspect provides spatial filtering concepts for the fringe projection concept. In yet another aspect, the fringe projection autofocus system and method is provided with temporal phase shifting using no moving parts. In a still further aspect, the fringe projection autofocus system and method is provided with unambiguous height measurement concepts.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goodwin, Eric Peter Oro Valley, US 63 476
Smith, Daniel Gene Tucson, US 58 195

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