Nano imprinting with reusable polymer template with metallic or oxide coating
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United States of America Patent
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Jul 21, 2020
Grant Date -
Feb 1, 2018
app pub date -
Oct 10, 2017
filing date -
Mar 15, 2013
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Abstract
Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.
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