Directed self-assembly
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United States of America Patent
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Sep 25, 2018
Grant Date -
Feb 1, 2018
app pub date -
Oct 10, 2017
filing date -
Jun 29, 2015
priority date (Note) -
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Abstract
The disclosure provides methods for directed self-assembly (DSA) of a block co-polymer (BCP). In one embodiment, a method includes: forming an oxide spacer along each of a first sidewall and a second sidewall of a cavity in a semiconductor substrate; forming a neutral layer between the oxide spacers and along a bottom of the cavity; and removing the oxide spacers to expose the first and second sidewalls and a portion of the bottom of the cavity adjacent the first and second sidewalls.
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