Microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device

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United States of America Patent

PATENT NO 10370242
APP PUB NO 20180029878A1
SERIAL NO

15662389

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Abstract

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A microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device, wherein the microelectromechanical device may include: a substrate; a diaphragm mounted to the substrate; a first electrode mounted to the diaphragm; a second electrode mounted to the substrate; wherein the first electrode is laterally adjacent to the second electrode; and wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AGCAMPBELL 1-15 NAUBIBERG GERMANY NEUBIBERG BAVARIA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dehe, Alfons Reutlingen, DE 163 2622
Herrmann, Matthias Friedrich Munich, DE 12 25
Manz, Johannes Munich, DE 7 8

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