Inkjet printing head
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United States of America Patent
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-
Sep 4, 2018
Grant Date -
Feb 1, 2018
app pub date -
Jul 24, 2017
filing date -
Jul 26, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
An inkjet printing head 1 includes an actuator substrate, having an ink flow passage that includes a pressure chamber, a movable film formation layer, including a movable film, disposed on the pressure chamber and defining a top surface portion of the pressure chamber, a piezoelectric element 9, formed on the movable film, and a protective substrate 4, bonded to the actuator substrate so as to cover the piezoelectric element 9, and the protective substrate 4 has an ink supply passage 53 in communication with the ink flow passage, and on a surface of the protective substrate 4 at an opposite side from the actuator substrate, an alignment mark 81 is formed in each of a plurality of small regions set by dividing an entire region of the surface.
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