Substrate conveying robot and operation method therefor
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United States of America Patent
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Mar 2, 2021
Grant Date -
Feb 1, 2018
app pub date -
Feb 13, 2015
filing date -
Feb 13, 2015
priority date (Note) -
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Abstract
A substrate conveying robot has a robot arm including an end effector having a substrate holding unit holding a substrate, arm drive unit for driving the robot arm, an elevating drive unit for elevatingly driving the end effector, a robot control unit controlling the arm drive unit, the elevating drive unit, and the substrate holding unit, and a substrate detection unit having a substrate detection unit which detects a vertical position of the substrate and elevates coordinately with an elevating operation of the end effector. By this configuration, a vertical position of a substrate to be conveyed is detected with high accuracy so that a robot operation can be controlled based on the detection result.
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