GAS DISTRIBUTION DEVICE FOR FLUIDISED-BED REACTOR SYSTEM, FLUIDISED-BED REACTOR SYSTEM COMPRISING GAS DISTRIBUTION DEVICE, AND METHOD FOR PREPARING GRANULAR POLYSILICON USING FLUIDISED-BED REACTOR SYSTEM
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United States of America Patent
Stats
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N/A
Issued Date -
Feb 1, 2018
app pub date -
Mar 24, 2016
filing date -
Apr 1, 2015
priority date (Note) -
Published
status (Latency Note)
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Abstract
The present invention relates to a gas distribution unit for a fluidized bed reactor system, a fluidized bed reactor system having the gas distribution unit, and a method for preparing granular polysilicon using the fluidized bed reactor system. The gas distribution unit for a fluidized bed reactor system according to the present invention enables gas flow rate control and gas composition control for each zone within the plenum chamber. In addition, a fluidized bed reactor system having the gas distribution unit enables shape control of a fluidized bed (in particular, transition between a bubbling fluidized bed and a spout fluidized bed). The method for preparing granular polysilicon using the fluidized bed reactor system not only simultaneously improves process stability and productivity, but also enables more flexible handling in the event of an abnormal situation.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
HANWHA CHEMICAL CORPORATION | SEOUL 100-220 |
International Classification(s)

- 2016 Application Filing Year
- C23C Class
- 3247 Applications Filed
- 2111 Patents Issued To-Date
- 65.02 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
AHN, Gui Ryong | Daejeon, KR | 14 | 39 |
# of filed Patents : 14 Total Citations : 39 | |||
HAN, Joo Hee | Seoul, KR | 18 | 112 |
# of filed Patents : 18 Total Citations : 112 | |||
KIM, Gil Ho | Daejeon, KR | 15 | 25 |
# of filed Patents : 15 Total Citations : 25 | |||
KIM, Ji Ho | Suncheon-si, KR | 124 | 501 |
# of filed Patents : 124 Total Citations : 501 | |||
KIM, Sang ah | Incheon, KR | 7 | 6 |
# of filed Patents : 7 Total Citations : 6 | |||
LEE, Won Ik | Seoul, KR | 11 | 29 |
# of filed Patents : 11 Total Citations : 29 |
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Patent Citation Ranking
- 1 Citation Count
- C23C Class
- 32.86 % this patent is cited more than
- 7 Age
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