TFT circuit board and display device having the same
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United States of America Patent
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Jul 13, 2021
Grant Date -
Jan 25, 2018
app pub date -
Jul 13, 2017
filing date -
Jul 19, 2016
priority date (Note) -
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Abstract
The invention allows stable fabrication of a TFT circuit board used in a display device and having thereon an oxide semiconductor TFT. A TFT circuit board includes a TFT that includes an oxide semiconductor. The TFT has a gate insulating film formed on part of the oxide semiconductor and a gate electrode formed on the gate insulating film. A portion of the oxide semiconductor that is covered with the gate electrode 104 and a portion of the oxide semiconductor that is not covered with the gate electrode are both covered with a first interlayer insulating film. The first interlayer insulating film is covered with a first film 106, and the first film is covered with a first AlO film.
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